1State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, 116024, Dalian, Liaoning, China.
2Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, 116024, Dalian, Liaoning, China.
3AECC Sichuan Gas Turbine Establishment, 610500, Chengdu, Sichuan, China.
4State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, 116024, Dalian, Liaoning, China. yili@dlut.edu.cn.
5Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, 116024, Dalian, Liaoning, China. yili@dlut.edu.cn.
6State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, 116024, Dalian, Liaoning, China. mengxiwu@dlut.edu.cn.
7Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, 116024, Dalian, Liaoning, China. mengxiwu@dlut.edu.cn.
8State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, 116024, Dalian, Liaoning, China. liujs@dlut.edu.cn.
9Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, 116024, Dalian, Liaoning, China. liujs@dlut.edu.cn.