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Peer-Reviewed Publication
Small2026;e74816.July 25, 2026Journal Article

Inkjet-Printed SiOxNy Barrier Film for Encapsulation of Perovskite Solar Cells.

Bohan Li1,2, Jian Qin1,3, Jiajun Hong1,4, Yinzhi Gong1,3, Lifeng Sang1,3, Ke Shui1,3, Tianyu Xu1,3, Xingze Chen1,3, Junhe Zhu1,3, Changzeng Ding1, Shuangli Yang5, Zongbo Zhang6, Qun Luo1, Chang-Qi Ma1
1i-Lab & Printable Electronics Research Center, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, People's Republic of China.
2Nano Science and Technology Institute, University of Science and Technology of China, Suzhou, People's Republic of China.
3School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, People's Republic of China.
4School of CHIPS, XJTLU Entrepreneur College (Taicang), Xi'an Jiaotong-Liverpool University, Suzhou, People's Republic of China.
5Vacuum Interconnected Nanotech Workstation (Nano-X), Suzhou Institute of Nano-Tec and Nano-Bionics, Chinese Academy of Sciences, Suzhou, People's Republic of China.
6Key Laboratory of Science and Technology on High-tech Polymer Materials, Institute of Chemistry, Chinese Academy of Sciences, Beijing, People's Republic of China.

Abstract

Thin-film encapsulation is a suitable method for enhancing the environmental stability of perovskite solar cells (PSCs) against oxygen and moisture. In this work, inkjet printing of perhydropolysilazane (PHPS) solution was first adopted to fabricate silicon oxynitride (SiOxNy) barrier films, which were converted from PHPS via vacuum ultraviolet (VUV) treatment. The transformation process was confi…

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