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Peer-Reviewed Publication
Sensors (Basel)2017;17(11)November 18, 2017Journal Article

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation.

Hyukjin J Kwon1, Seyeong Seok2, Geunbae Lim3
1Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang 37673, Korea. elkei@postech.ac.kr.
2Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang 37673, Korea. athelas@postech.ac.kr.
3Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang 37673, Korea. limmems@postech.ac.kr.
PubMed PMC DOI PDF

Abstract

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and circ…

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